Work

Fabrication of diamond films under high density helium plasma formed by electron cyclotron resonance

Year: 1991

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/0257-8972(91)90086-c

Authors: Motokazu Yuasa, Hiroshi Kawarada, Jin Wei, Jing Sheng Ma, Jun-ichi Suzuki, Sigenobu Okada, Akio Hiraki

Institutions: Waseda University, Sekisui Chemical (Japan), Shimadzu (Japan), The University of Osaka

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2021187557

FWCI: 1.15

Cites: 15

Cited by: 7

Related to: 10