Work

A susceptor with partial-torus groove in vertical MOCVD reactor by induction heating

Year: 2014

Type: article

Source: International Journal of Heat and Mass Transfer

DOI: 10.1016/j.ijheatmasstransfer.2014.03.088

Authors: Zhiming Li, Hailing Li, Jincheng Zhang, Jinping Li, Haiying Jiang, Xiaoqian Fu, Yanbin Han, Yingjie Xia, Yimei Huang, Jianqin Yin, Lejuan Zhang, Shigang Hu

Institutions: University of Jinan, Shandong College of Electronic Technology, Xidian University, Hunan University of Science and Technology

Language: English

Topic: Heat Transfer and Numerical Methods

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: 辐照及高电场应力诱发的AlGaN/GaN HEMT 器件退化机制与模型研究

OpenAlex ID: W2021419084

FWCI: 1.079

Cites: 19

Cited by: 15

Related to: 10