Crystal growth and microstructure of polycrystalline Ti1−xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering
Year: 1993
Type: article
Source: Thin Solid Films
Institutions: Linköping University, University of Illinois Urbana-Champaign
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Lunds Universitet
OpenAlex ID: W2021591827