Work

Infrared thermography-assisted detection of surface alteration during plasma cleaning and implications on subsequently deposited magnetron sputtered films

Year: 2005

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/j.surfcoat.2005.08.038

Authors: M. Diesselberg, H.-R. Stock, R. Cremer, H.-G. Fuss

Institution: CemeCon (Germany)

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2021595947

FWCI: 0.615

Cites: 7

Cited by: 5

Related to: 10