Work

Elimination of Vmin failures in 0.15um logic process

Year: 2006

Type: conference-paper

Source: IEEE International Symposium on Semiconductor Manufacturing conference proceedings

DOI: 10.1109/issm.2006.4493047

Authors: Yee Ming Chan, Pik Yee Ng, Ling Yun Miao, Hyun Gu Yoon, Kin San Pey

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2022604352

FWCI: 0.529

Cites: 8

Cited by: 1

Related to: 10