Work

Power supply with arc handling for high peak power magnetron sputtering

Year: 2004

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.1688365

Authors: D. J. Christie, F. Tomasel, W. D. Sproul, D. C. Carter

Institution: Advanced Energy (United States)

Language: English

Topic: Pulsed Power Technology Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2023901648

FWCI: 0.95

Cites: 17

Cited by: 35

Related to: 10