Work

Changes in surface roughness and work function of indium-tin-oxide due to KrF excimer laser irradiation

Year: 2005

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.1953670

Authors: Yow-Jon Lin, Iain D. Baikie, Wei-Yang Chou, Shih-Ting Lin, Hsing-Cheng Chang, Yao-Ming Chen, Wen-Fung Liu

Institutions: National Changhua University of Education, National Cheng Kung University, Feng Chia University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Council

OpenAlex ID: W2023944009

FWCI: 3.618

Cites: 18

Cited by: 19

Related to: 10