Experimental quantification of reticle electrostatic damage below the threshold for ESD
Year: 2008
Type: conference-paper
DOI: 10.1117/12.760480
Authors: Gavin C. Rider, Thottam S. Kalkur
Institution: University of Colorado Colorado Springs
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2024209331