Work

Fabrication of microstructured copper on an indium–tin–oxide surface using a micropatterned self-assembled monolayer as a template

Year: 2003

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.1584037

Authors: Shuuichi Asakura, Mitsuhito Hirota, Akio Fuwa

Institution: Waseda University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Institute of Advanced Industrial Science and Technology

OpenAlex ID: W2024344441

FWCI: 1.255

Cites: 29

Cited by: 10

Related to: 10