Work

Microelectronics planar technologies for the manufacturing of high spatial frequency gratings: sub-angstroem assessment of spatial coherence

Year: 2001

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.448042

Authors: Olivier M. Parriaux, Y. Jourlin, Florent Pigeon, G. Bouchet, Paul W. Van Dijk, Rudy J. M. Pellens, Suat Topcu, Yasser Alayli, Marc Bonis

Institutions: Université Jean Monnet, Université Jean Monnet, ASML (Netherlands), Université de Technologie de Compiègne

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2024674819

FWCI: 1.73

Cites:

Cited by: 2

Related to: 10