Work

An AlGaAs laser with high-quality dry etched mirrors fabricated using an ultrahigh vacuum in situ dry etching and deposition processing system

Year: 1988

Type: article

Source: IEEE Journal of Quantum Electronics

DOI: 10.1109/3.8560

Authors: M. Uchida, S. Ishikawa, N. Takado, K. Asakawa

Institution: NEC (Japan)

Language: English

Topic: Semiconductor Lasers and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2024919304

FWCI: 2.37

Cites: 16

Cited by: 21

Related to: 10