Work

Fabrication and characterization of stacked ZnO and ZnOGa2O3 layers for the realization of bulk acoustic wave resonated membranes

Year: 2007

Type: article

Source: Microelectronics Journal

DOI: 10.1016/j.mejo.2007.03.010

Authors: Y. Zaatar, R. Al Asmar, J. Podlecki, S. Youssef, M. Abdallah, N. Ouaini, A. Foucaran

Institutions: Holy Spirit University of Kaslik, Centre National de la Recherche Scientifique, Université de Montpellier, Institut d'Électronique et des Systèmes, Université Montpellier 2

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2025548639

FWCI:

Cites: 19

Cited by: 2

Related to: 10