Gas-phase diagnosis and high-rate growth of stable a-Si:H
Year: 1999
Type: article
Source: Thin Solid Films
Authors: T. Takagi, R. Hayashi, G. Ganguly, M. Kondo, A. Matsuda
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2026005392
