Effect of Crystal Orientation on Dielectric Properties of Lead Zirconium Titanate Thin Films Prepared by Reactive RF-Sputtering
Year: 2001
Type: article
Abstract: Theoretical calculations based on phenomenology of ferroelectrics have been previously reported for lead zirconium titanate (PZT) system. This paper offers an experimental comparison of the crystal orientation dependence of dielectric properties for PZT thin films grown using reactive RF-sputtering. Highly oriented PZT thin films with a rhombohedral composition have been grown in different orientations using selective rapid thermal annealing cycles. The PZT(100) oriented films showed larger dielectric constant and loss compared to PZT(111) films. The PZT(100) films possessed sharp square-like hysteresis loops indicating a instantaneous switching of domains at the coercive field whereas the PZT(111) films showed smooth hysteresis loops as expected from our phenomenological calculations.
DOI: 10.1143/jjap.40.713
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
Funder: Office of Naval Research
OpenAlex ID: W2030182102
