Work

Durability of nitrided fluorocarbon polymer films for nanoimprint lithography

Year: 2011

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2011.03.124

Authors: Han-Hyoung Kim, Se-Geun Park, El-Hang Lee, Seung-Gol Lee, Beom-Hoan O

Institution: Inha University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2030531007

FWCI: 0.406

Cites: 12

Cited by: 3

Related to: 10