Influence of postdeposition annealing on the properties of ZnO films prepared by RF magnetron sputtering
Year: 2003
Type: article
Authors: Sheng-Yuan Chu, Walter Water, Jih-Tsang Liaw
Institution: National Cheng Kung University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Council
OpenAlex ID: W2036634154