Year: 1987
Type: article
Abstract: The structural, superconducting and optical properties of ZrN thin fims deposited on single-crystal sapphire substrates by dc reactive magnetron sputtering are investigated. Their properties, in particular superconducting T cs, strongly depend on substrate temperatures. Films with a highly (100) textured B1 structure, which are deposited at substrate temperatures above 700°C, exhibit T cs and residual resistivity ratios as high as 10.0 K and 15. Systematic changes in the wavelength of the optical reflectivity edge suggests that Zr vacancies suppress T c for films deposited at lower substrate temperatures.
DOI: 10.1143/jjap.26.l570
Institution: NTT (Japan)
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2037558591