Work

Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)

Year: 1989

Type: article

Source: Sensors and Actuators

DOI: 10.1016/0250-6874(89)80006-x

Authors: Y. Lindén, L. Tenerz, J. Tirén, B. Hök

Institution: Uppsala University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2038024371

FWCI: 7.555

Cites: 9

Cited by: 42

Related to: 10