Work

Finite element method analysis and control of micro actuator with piezoelectric element for spinstand

Year: 2005

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-005-0530-8

Authors: Akihiro Naganawa, Shigeki Mori, Hirohiko Tada, Yotsugi Shibuya, Goro Obinata, Kazuhiro Ouchi

Institutions: Akita University, Nagoya University

Language: English

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2038765280

FWCI:

Cites: 9

Cited by: 6

Related to: 10