Work

PZT piezoelectric coefficient extraction by PZT-actuated micro-beam characterization and modeling

Year: 2012

Type: conference-paper

Source: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

DOI: 10.1109/esime.2012.6191704

Authors: F. Casset, M. Cueff, A. Suhm, G. Le Rhun, J. Abergel, M. Allain, C. Dieppedale, T. Ricart, S. Fanget, P. Renaux, D. Faralli, P. Ancey, A. Devos, E. Defay

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Électronique des Technologies de l'Information, STMicroelectronics (Italy), STMicroelectronics (France), Centre National de la Recherche Scientifique, Institut Supérieur de l'Électronique et du Numérique, Institut d'Electronique, de Microélectronique et de Nanotechnologie

Language: English

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2039808784

FWCI: 5.791

Cites: 8

Cited by: 7

Related to: 10