Work

DSA-aware assist features

Year: 2015

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2085954

Authors: Azat Latypov, Tamer H. Coskun

Institution: GlobalFoundries (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2040582004

FWCI: 1.692

Cites: 6

Cited by: 5

Related to: 10