Work

Estimation of the Damping in MEMS Inertial Sensors: Comparison Between Numerical and Experimental Results Both at High and Low Pressure Levels

Year: 2006

Type: conference-paper

Source: ASME Biennial Conference on Engineering Systems Design and Analysis (ESDA)

DOI: 10.1115/esda2006-95549

Authors: Francesco Braghin, Elisabetta Leo, Ferruccio Resta

Institution: Politecnico di Milano

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2040690198

FWCI: 1.583

Cites:

Cited by: 5

Related to: 10