Functional localization in integrated circuits by signal selective voltage contrast in a scanning electron microscope
Year: 1994
Type: article
Source: Microelectronic Engineering
Authors: F. Marc, H. Frémont, P. Jounet, Y. Danto, M. Barré
Institutions: Université de Bordeaux, Université Bordeaux-I
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2040929469