Infrared laser diagnostics in methane chemical-vapor-deposition plasmas
Year: 1992
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.351361
Authors: P. B. Davies, P. M. Martineau
Institution: University of Cambridge
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2040940797