Work

Extreme ultraviolet multilayer mirror with near-zero IR reflectance

Year: 2009

Type: article

Source: Optics Letters

DOI: 10.1364/ol.34.003680

Authors: W. A. Soer, P. Gawlitza, M. M. J. W. van Herpen, M. J. J. Jak, S. Braun, P. Muys, V. Y. Banine

Institutions: Philips (Netherlands), Fraunhofer Institute for Material and Beam Technology, ASML (Netherlands)

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2043768664

FWCI: 1.751

Cites: 13

Cited by: 27

Related to: 10