Work

A surface cleaning method for sputter deposition of pure titanium film onto TiNi shape memory alloy substrate

Year: 2001

Type: article

Source: Vacuum

DOI: 10.1016/s0042-207x(00)00384-5

Authors: T Sonoda, A Watazu, J Zhu, A Kamiya, K Ushiki, K Naganuma, M Kato

Institution: Nagoya Industrial Science Research Institute

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2043798142

FWCI: 1.257

Cites: 4

Cited by: 8

Related to: 10