Work

Disordered intermixing at the platinum:silicon interface demonstrated by high-resolution cross-sectional transmission electron microscopy, Auger electron spectroscopy, and MeV ion channeling

Year: 1988

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.340058

Authors: John R. Abelson, Ki Bum Kim, Douglas E. Mercer, C. Robert Helms, Robert Sinclair, Thomas W. Sigmon

Institution: Stanford University

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2043907421

FWCI: 5.164

Cites: 15

Cited by: 78

Related to: 10