Work

Hybrid deposition of piezoelectric $$(11\bar 20)$$ MgxZn1−xO (0≤x≤0.3) on $$(01\bar 12)$$ R-sapphire substrates using RF sputtering and MOCVDR-sapphire substrates using RF sputtering and MOCVD

Year: 2006

Type: article

Source: Journal of Electronic Materials

DOI: 10.1007/s11664-006-0259-x

Authors: Gaurav Saraf, Ying Chen, Theo Siegrist, Leszek S. Wielunski, Yicheng Lu

Institutions: Rutgers, The State University of New Jersey, Alcatel-Lucent (France)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: State of New Jersey Commission on Science and Technology

OpenAlex ID: W2043915872

FWCI: 2.297

Cites: 10

Cited by: 8

Related to: 10