Work

Microfabrication by electrochemical metal removal

Year: 1998

Type: article

Source: IBM Journal of Research and Development

DOI: 10.1147/rd.425.0655

Author: M. Datta

Institution: IBM Research - Thomas J. Watson Research Center

Language: English

Topic: Advanced Machining and Optimization Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2043937918

FWCI: 0.933

Cites:

Cited by: 81

Related to: 10