Year: 2002
Type: article
Abstract: In order to establish the applicability conditions of incoherent laser Thomson scattering (LTS) for plasma diagnostics of electron properties to various kinds of discharge plasmas, a method of approach was discussed, and criteria for applicability were established. These criteria were then applied to three representative discharge plasmas: inductively coupled plasmas (ICP) in Ar/CF4 and Ar/O2 gases, and a microwave-produced plasma in a H2/CH4 gas. Implications of the results are discussed.
Source: プラズマ・核融合学会誌
DOI: 10.1585/jspf.78.242
Institutions: Kyushu University, Fukuoka Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2044707685