Work

Single two-axis micromachined tilt mirror and linear array

Year: 2003

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.472858

Authors: Michael R. Whitley, Jay A. Hammer, Zhili Hao, Brian Wingfield, Luis Nelson

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2045888552

FWCI: 1.794

Cites:

Cited by: 7

Related to: 10