Progress toward a raster multibeam lithography tool
Year: 2004
Type: article
DOI: 10.1116/1.1645885
Authors: S. T. Coyle, B. Shamoun, M. Yu, J. Maldonado, T. Thomas, D. Holmgren, X. Chen, M. R. Scheinfein, B. DeVore, M. Gesley
Institutions: Applied Materials (United States), Simon Fraser University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2045911217