Work

Real-time study of migration in aluminum films by means of subÅngström-sensitive scattering and profiling methods

Year: 1991

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(91)90333-s

Authors: Lars Mattsson, Yves-Henri Le Page, Fredric Ericson

Institution: Uppsala University

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2046012467

FWCI: 0.586

Cites: 11

Cited by: 20

Related to: 10