Work

Effects of composition and thermal annealing on the mechanical properties of silicon oxycarbide films

Year: 2012

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2012.01.002

Authors: Ping Du, Xiaoning Wang, I.-Kuan Lin, Xin Zhang

Institution: Boston University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Division of Civil, Mechanical and Manufacturing Innovation, Division of Electrical, Communications and Cyber Systems

OpenAlex ID: W2047155293

FWCI: 5.335

Cites: 35

Cited by: 59

Related to: 10