Work

A novel design of brush scrubbing in post-CMP cleaning

Year: 2014

Type: article

Source: International Journal of Machine Tools and Manufacture

DOI: 10.1016/j.ijmachtools.2014.05.003

Authors: Zuqiang Qi, Wanjia Lu, Weiming Lee

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Chinese Academy of Sciences

Award: G6806127070

OpenAlex ID: W2047355481

FWCI: 3.495

Cites: 51

Cited by: 33

Related to: 10