R.f. plasma-assisted chemical vapour deposition of diamond-like carbon: physical and mechanical properties
Year: 1992
Type: article
Source: Thin Solid Films
Authors: E.H.A. Dekempeneer, R. Jacobs, J. Smeets, J. Meneve, L. Eersels, B. Blanpain, J. Roos, D.J. Oostra
Institutions: Flemish Institute for Technological Research, KU Leuven
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2048409136