Work

Thermal decomposition of diethylgermane on Si(100)-(2×1)

Year: 1994

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.579130

Authors: Wei Du, Lori A. Keeling, C. Michael Greenlief

Institution: University of Missouri

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Los Alamos National Laboratory

OpenAlex ID: W2048779142

FWCI: 2.4

Cites:

Cited by: 39

Related to: 10