Work

Properties of Silicon Oxynitride and Aluminum Oxynitride Coatings Deposited Using Ion Assisted Deposition

Year: 1988

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-128-61

Authors: G. A. Al-Jumaily, T. A. Mooney, W. A. Spurgeon, H. M. Dauplaise

Institution: United States Army

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2048880680

FWCI:

Cites: 5

Cited by:

Related to: 10