Work

Focused ion beam deposition of Pt containing films

Year: 1992

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.586028

Authors: J. Puretz, L. W. Swanson

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2050154093

FWCI: 1.569

Cites:

Cited by: 81

Related to: 10