Work

Active CMOS-MEMS AFM-like conductive probes for field-emission assisted nano-scale fabrication

Year: 2010

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2010.5442496

Authors: Y. Zhang, S. Santhanam, J. Liu, G.K. Fedder

Institution: Carnegie Mellon University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2050844444

FWCI: 2.615

Cites: 10

Cited by: 11

Related to: 10