Work

Duoplasmatron Ion Beam Source for Vacuum Sputtering of Thin Films

Year: 1967

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/1.1721039

Authors: K. L. Chopra, M. R. Randlett

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2052014067

FWCI: 0.566

Cites: 16

Cited by: 36

Related to: 10