Atomic layer epitaxy
Year: 1986
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.337344
Authors: Colin H. L. Goodman, Markus V. Pessa
Institution: Tampere University of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2052726420