Work

Reactive magnetron sputter deposited CNx: Effects of N2 pressure and growth temperature on film composition, bonding, and microstructure

Year: 1996

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.580190

Authors: W. T. Zheng, H. Sjöström, I. Ivanov, K. Z. Xing, E. Broitman, W. R. Salaneck, J. E. Greene, J.-E. Sundgren

Institution: Linköping University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: U.S. Department of Energy, Division of Materials Research

OpenAlex ID: W2053482883

FWCI: 28.89

Cites:

Cited by: 179

Related to: 10