Work

Maskless nano-implant of 20 keV Ga+ in bulk Si(1 0 0) substrates

Year: 2014

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/j.nimb.2013.11.044

Authors: R.G. Milazzo, G. D’Arrigo, A.M. Mio, E. Rimini, C. Spinella, L. Peto, A. Nadzeyka, S. Bauerdick

Institutions: Institute for Microelectronics and Microsystems, Raith (Germany)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2053791828

FWCI: 0.173

Cites: 34

Cited by: 2

Related to: 10