Work

High Aspect Ratio Microstructures in LiNbO3 Produced by Ion Beam Enhanced Etching

Year: 2005

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-0908-oo16-01

Authors: Frank Schrempel, Thomas Gischkat, Holger Hartung, Ernst Bernhard Kley, Werner Wesch, Andreas Tünnermann

Institution: Friedrich Schiller University Jena

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2053987724

FWCI:

Cites: 23

Cited by: 6

Related to: 10