Work

Laser sputtering. Part II. The mechanism of the sputtering of Al2O3

Year: 1984

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/0168-583x(84)90083-1

Authors: Joshua E. Rothenberg, Roger Kelly

Institution: IBM Research - Thomas J. Watson Research Center

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2054837845

FWCI: 23.69

Cites: 23

Cited by: 102

Related to: 10