Work

Full-wafer thermal imaging in ultrahigh epitaxy tools

Year: 2010

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.872967

Authors: Bernard Paquette, André Fekecs, Badii Gsib, Hubert Pelletier, Richard Arès

Institution: Université de Sherbrooke

Language: English

Topic: Thermography and Photoacoustic Techniques

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2054838641

FWCI: 1.479

Cites:

Cited by: 1

Related to: 10