Work

SIMS and auger investigation of thin a-SiC and a-SiC:H films by Up-Down sputtering DC magnetron, impact on optical properties

Year: 2014

Type: conference-paper

Source: North African Workshop on Dielectric Materials for Photovoltaic Systems (NAWDMPV)

DOI: 10.1109/nawdmpv.2014.6997619

Authors: M. A. Ouadfel, A. Keffous, A. Cheriet, C. Yaddaden, N. Gabouze, Y. Belkacem, A. Khelloufi, H. Menari, M. Siad

Institutions: Centre de Recherche en Technologie des Semi-conducteurs pour l’Energétique, Centre de Recherche Nucléaire d’Alger

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2055045237

FWCI:

Cites: 30

Cited by: 4

Related to: 10