Ultra Low Contact Resistivities for CMOS Beyond 10-nm Node
Year: 2013
Type: article
Source: IEEE Electron Device Letters
Authors: Zhen Zhang, Siyuranga Obasa Koswatta, Stephen W. Bedell, Ashish Baraskar, Michael Guillorn, Sebastian U. Engelmann, Yu Zhu, Jemima Gonsalves, Adam Pyzyna, Marinus Hopstaken, Christian Witt, Li Yang, Fei Liu, Joseph Newbury, Wei Song, Cyril Cabral, Michael Lofaro, Ahmet S. Ozcan, Mark Raymond, Christian Lavoie, Jeffrey W. Sleight, Kenneth P. Rodbell, Paul M. Solomon
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2056572873