Work

Low-temperature and low thermal budget fabrication of polycrystalline silicon thin-film transistors

Year: 1996

Type: article

Source: IEEE Electron Device Letters

DOI: 10.1109/55.541762

Authors: Hsiao-Yi Lin, Chun-Yen Chang, Tan Fu Lei, Feng-Ming Liu, Wen-Luh Yang, Juing-Yi Cheng, Hua-Chou Tseng, Liang-Po Chen

Institutions: National Yang Ming Chiao Tung University, Feng Chia University

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Chiao Tung University

OpenAlex ID: W2056992005

FWCI: 0.923

Cites: 8

Cited by: 8

Related to: 10